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AZO/Au/AZO multilayer as a transparent conductive electrode

Title
AZO/Au/AZO multilayer as a transparent conductive electrode
Author
전형탁
Keywords
ALD; Al doped ZnO; multilayers; transparent conducting oxides; ATOMIC LAYER DEPOSITION; ZNO THIN-FILMS; ZINC-OXIDE
Issue Date
2012-12
Publisher
WILEY-V C H VERLAG GMBH
Citation
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE,Vol.209,No.4,p698-701
Abstract
A multilayer of Al doped ZnO/gold/Al doped ZnO (AZO/Au/AZO) was deposited by atomic layer deposition (ALD), and its structural, electrical, and optical properties were investigated. The thin Au interlayer was deposited by e-beam evaporator and showed a series of islands. As the Au interlayer thickness increased, the Au islands coalesced resulting in a continuous Au film at 12 nm or thicker. As the Au interlayer thickness increased to 12 nm, the carrier concentration increased from 1.3 x 10(20) to 4.2 x 10(21) cm(-3), the Hall mobility increased from 13.4 to 22.4 cm(2)/Vs, and the resistivity decreased from 2.6 x 10(-3) to 1.2 x 10(-4) Omega cm. However, the transmittance decreased from 80 to 48%. Additionally, the AZO/Au/AZO multilayer was less crystalline than a single AZO layer. (C) 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
URI
http://onlinelibrary.wiley.com/doi/10.1002/pssa.201127049/abstract?http://hdl.handle.net/20.500.11754/42904
ISSN
1862-6300
DOI
10.1002/pssa.201127049
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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