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Microstructure Evolution of Titanium Nitride Film during Vacuum Kinetic Spraying

Title
Microstructure Evolution of Titanium Nitride Film during Vacuum Kinetic Spraying
Author
이창희
Keywords
AEROSOL DEPOSITION METHOD; MOLECULAR-DYNAMICS; ROOM-TEMPERATURE; THICK-FILMS; PLASTICITY; CERAMICS; DEFORMATION; FAILURE; CARBIDE
Issue Date
2013-01
Publisher
WILEY-BLACKWELL
Citation
Journal of the American Ceramic Society, 2013, 96(1), P.40-43
Abstract
Single crystal titanium nitride powder was used to fabricate titanium nitride films using a vacuum kinetic spray (VKS) process. Field emission scanning electron microscopy (FESEM) and transmission electron microscopy (FETEM) were used to investigate the microstructure of the as-fabricated films under different process conditions. Plastic deformation features (i.e., amorphization, rotated grain, slip bands, and distorted lattices in the transition structure) revealed an elastic-to-inelastic transition of titanium nitride particles at high strain rate and high pressure induced by hypervelocity impact, which was considered vital for grain refinement and film growth during the process.
URI
http://onlinelibrary.wiley.com/doi/10.1111/jace.12101/abstracthttp://hdl.handle.net/20.500.11754/41435
ISSN
0002-7820
DOI
10.1111/jace.12101
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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