Low operation voltage and high thermal stability of a WSi2 nanocrystal memory device using an Al2O3/HfO2/Al2O3 tunnel layer
- Title
- Low operation voltage and high thermal stability of a WSi2 nanocrystal memory device using an Al2O3/HfO2/Al2O3 tunnel layer
- Other Titles
- HfO2
- Author
- 김은규
- Keywords
- RETENTION TIME; NONVOLATILE; BARRIER; ENERGY
- Issue Date
- 2012-02
- Publisher
- Amer Inst Physics
- Citation
- Applied Physics Letters, Feb 2012, 100(7)
- Abstract
- A WSi2 nanocrystal nonvolatile memory device was fabricated with an Al2O3/HfO2/Al2O3 (AHA) tunnel layer and its electrical characteristics were evaluated at 25, 50, 70, 100, and 125 degrees C. The program/erase (P/E) speed at 125 degrees C was approximately 500 mu s under threshold voltage shifts of 1V during voltage sweeping of 8V/-8V. When the applied pulse voltage was +/- 9V for 1 s for the P/E conditions, the memory window at 125 degrees C was approximately 1.25V after 10(5) s. The activation energies for the charge losses of 5%, 10%, 15%, 20%, 25%, 30%, and 35% were approximately 0.05, 0.11, 0.17, 0.21, 0.23, 0.23, and 0.23 eV, respectively. The charge loss mechanisms were direct tunneling and Pool-Frenkel emission between the WSi2 nanocrystals and the AHA barrier engineered tunneling layer. The WSi2 nanocrystal memory device with multi-stacked high-K tunnel layers showed strong potential for applications in nonvolatile memory devices. (C) 2012 American Institute of Physics.
- URI
- http://aip.scitation.org/doi/10.1063/1.3684967
- ISSN
- 0003-6951; 1077-3118
- DOI
- 10.1063/1.3684967
- Appears in Collections:
- COLLEGE OF NATURAL SCIENCES[S](자연과학대학) > PHYSICS(물리학과) > Articles
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