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dc.contributor.author이효창-
dc.date.accessioned2018-02-14T05:56:46Z-
dc.date.available2018-02-14T05:56:46Z-
dc.date.issued2011-11-
dc.identifier.citationThin Solid Films, 2011, P185-188en_US
dc.identifier.issn0040-6090-
dc.identifier.uriComparisons of the electrical characteristics by impedance matching conditions on the E–H and H–E transition and the hysteresis of inductively coupled plasma-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/37455-
dc.description.abstractDifferent electrical characteristics depending on the impedance matching conditions were observed in inductively coupled plasma during the E?H mode and H?E mode transition and their hysteresis. At the auto matching condition, there was no hysteresis loop on the E?H and H?E transition, while the hysteresis loop was clearly observed at the fixed matching condition. This result shows that the impedance matching condition is the primary cause for the hysteresis loop.en_US
dc.language.isoenen_US
dc.publisherElsevier B.V.en_US
dc.subjectInductively coupled plasmaen_US
dc.subjectE?H mode transitionen_US
dc.subjectH?E mode transitionen_US
dc.subjectImpedance matching effecten_US
dc.titleComparisons of the electrical characteristics by impedance matching conditions on the E?H and H?E transition and the hysteresis of inductively coupled plasmaen_US
dc.typeArticleen_US
dc.identifier.doi10.1016/j.tsf.2011.12.015-
dc.relation.page185-188-
dc.relation.journalTHIN SOLID FILMS-
dc.contributor.googleauthorLee, Hyo-Chang-
dc.contributor.googleauthorChung, Chin-Wook-
dc.contributor.googleauthor이효창-
dc.contributor.googleauthor정진욱-
dc.relation.code2011209470-
dc.sector.campusS-
dc.sector.daehakRESEARCH INSTITUTE[S]-
dc.identifier.pidflower4507-
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