32 0

Comparisons of the electrical characteristics by impedance matching conditions on the E?H and H?E transition and the hysteresis of inductively coupled plasma

Title
Comparisons of the electrical characteristics by impedance matching conditions on the E?H and H?E transition and the hysteresis of inductively coupled plasma
Author
이효창
Keywords
Inductively coupled plasma; E?H mode transition; H?E mode transition; Impedance matching effect
Issue Date
2011-11
Publisher
Elsevier B.V.
Citation
Thin Solid Films, 2011, P185-188
Abstract
Different electrical characteristics depending on the impedance matching conditions were observed in inductively coupled plasma during the E?H mode and H?E mode transition and their hysteresis. At the auto matching condition, there was no hysteresis loop on the E?H and H?E transition, while the hysteresis loop was clearly observed at the fixed matching condition. This result shows that the impedance matching condition is the primary cause for the hysteresis loop.
URI
Comparisons of the electrical characteristics by impedance matching conditions on the E–H and H–E transition and the hysteresis of inductively coupled plasmahttp://hdl.handle.net/20.500.11754/37455
ISSN
0040-6090
DOI
10.1016/j.tsf.2011.12.015
Appears in Collections:
RESEARCH INSTITUTE[S](부설연구소) > ETC
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE