Dielectric characteristics of a barium titanate film deposited by Nano Particle Deposition System (NPDS)

Title
Dielectric characteristics of a barium titanate film deposited by Nano Particle Deposition System (NPDS)
Author
이선영
Keywords
Aerosol deposition method (ADM); Barium titanate; Capacitor; Ferroelectric film; Nano particle deposition system (NPDS); BATIO3 THIN-FILMS; CHEMICAL-VAPOR-DEPOSITION; AEROSOL DEPOSITION; ROOM-TEMPERATURE; GLASS-CERAMICS; LOW VACUUM; CONSTRUCTION; FABRICATION; POWDERS; GROWTH
Issue Date
2015-05
Publisher
KOREAN SOC PRECISION ENG
Citation
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING, v. 16, NO 5, Page. 1029-1034
Abstract
Barium Titanate (BaTiO3, BT) layers were deposited using Nano Particle Deposition System (NPDS). NPDS is a type of Aerosol Deposition Method (ADM), dry deposition approach that simplifies the process of depositing a BaTiO3 layer because it eliminates the need for solvents or binder. In this study, a BaTiO3 dielectric layer was deposited using NPDS, and its dielectric properties and microstructure were characterized. Polarization-electric field (P-E) hysteresis analysis was used to characterize the resulting metalinsulator-metal (MIM) capacitor structure, and the capacitance value and leakage current were measured. The BaTiO3 dielectric layer had a thickness of 5 mu m and a high dielectric constant of 1300 without heat treatment, while maintaining high crystallinity after deposition. A high capacitance value of 228 nF/cm(2) was obtained. This work demonstrated the use of ADM for fabricating a capacitor structure.
URI
https://link.springer.com/article/10.1007/s12541-015-0133-yhttp://hdl.handle.net/20.500.11754/36929
ISSN
2234-7593; 2005-4602
DOI
10.1007/s12541-015-0133-y
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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