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Novel device structure for phase change memory toward low-current operation

Title
Novel device structure for phase change memory toward low-current operation
Author
송윤흡
Keywords
CARBON NANOTUBE ELECTRODES; ARRAY; FABRICATION; AREA
Issue Date
2015-09
Publisher
IOP PUBLISHING LTD
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, v. 54, NO 9, Page. 94302-94306
Abstract
We present a novel device architecture for low set and reset currents in phase change random access memory (PCRAM). In this structure, the sidewall of phase-change film is contacted with the vertical heating layer. In particular, to realize a small contact area of under 50 nm(2) for low reset current, this structure includes stacked layers consisting of extremely thin phase change material (PCM) and conduction films, the fabrication method of which is proposed. We estimated set and reset currents for the proposed structure by the device simulation method. Here, we confirmed that a contact area of 30 nm(2) in this structure, where Ge2Sb2Te5 is used as PCM, provides a reset current of 13.5 mu A and a set current of 4 mu A, which are promising for the scaling down of PCM. Furthermore, it is confirmed that the thinner PCM in this structure provides less thermal disturbance to the neighboring cell. From the results, we expect this structure to be a promising candidate for a high-density nonvolatile memory architecture with PCM. (C) 2015 The Japan Society of Applied Physics
URI
http://iopscience.iop.org/article/10.7567/JJAP.54.094302/metahttp://hdl.handle.net/20.500.11754/27539
ISSN
0021-4922; 1347-4065
DOI
10.7567/JJAP.54.094302
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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