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dc.contributor.author김은규-
dc.date.accessioned2017-03-09T05:03:36Z-
dc.date.available2017-03-09T05:03:36Z-
dc.date.issued2015-07-
dc.identifier.citationTHIN SOLID FILMS, v. 587, Page. 47-51en_US
dc.identifier.issn0040-6090-
dc.identifier.urihttp://www.sciencedirect.com/science/article/pii/S004060901500070X-
dc.identifier.urihttp://hdl.handle.net/20.500.11754/25979-
dc.description.abstractWe have studied a successive two-step chemical vapor deposition (CVD) method to prepare large-scale MoS2 thin films using a horizontal hot wall furnace. The CVD growth was followed by evaporation of the MoO3 precursor on similar to 2.5 x 2.5 cm(2) SiO2/Si substrates in the first step and a temperature ramp for sulfurization as a second step. Synthesized films were systematically analyzed by various structural and optical measurements. Crystallinity of the synthesized MoS2 tri-layer films exhibited a typical 2H-MoS2 structure and uniformly covered the whole substrate. MoS2 field effect transistors were fabricated by using the obtained CVD-MoS2, and these showed n-type behavior with an on/off ratio of about 10(3). (C) 2015 Elsevier B.V. All rights reserved.en_US
dc.description.sponsorshipThis work was supported by a National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (NRF-2013R1A2A2A01015824).en_US
dc.language.isoenen_US
dc.publisherELSEVIER SCIENCE SAen_US
dc.subjectMolybdenum disulfideen_US
dc.subjectChemical vapor depositionen_US
dc.subjectField effect transistoren_US
dc.titleStructural and optical properties of MoS2 layers grown by successive two-step chemical vapor deposition methoden_US
dc.typeArticleen_US
dc.relation.volume587-
dc.identifier.doi10.1016/j.tsf.2015.01.036-
dc.relation.page47-51-
dc.relation.journalTHIN SOLID FILMS-
dc.contributor.googleauthorQiu, Dongri-
dc.contributor.googleauthorLee, Dong Uk-
dc.contributor.googleauthorPak, Sang Woo-
dc.contributor.googleauthorKim, Eun Kyu-
dc.relation.code2015002894-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF NATURAL SCIENCES[S]-
dc.sector.departmentDEPARTMENT OF PHYSICS-
dc.identifier.pidek-kim-
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COLLEGE OF NATURAL SCIENCES[S](자연과학대학) > PHYSICS(물리학과) > Articles
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