Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 김은규 | - |
dc.date.accessioned | 2017-03-09T05:03:36Z | - |
dc.date.available | 2017-03-09T05:03:36Z | - |
dc.date.issued | 2015-07 | - |
dc.identifier.citation | THIN SOLID FILMS, v. 587, Page. 47-51 | en_US |
dc.identifier.issn | 0040-6090 | - |
dc.identifier.uri | http://www.sciencedirect.com/science/article/pii/S004060901500070X | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/25979 | - |
dc.description.abstract | We have studied a successive two-step chemical vapor deposition (CVD) method to prepare large-scale MoS2 thin films using a horizontal hot wall furnace. The CVD growth was followed by evaporation of the MoO3 precursor on similar to 2.5 x 2.5 cm(2) SiO2/Si substrates in the first step and a temperature ramp for sulfurization as a second step. Synthesized films were systematically analyzed by various structural and optical measurements. Crystallinity of the synthesized MoS2 tri-layer films exhibited a typical 2H-MoS2 structure and uniformly covered the whole substrate. MoS2 field effect transistors were fabricated by using the obtained CVD-MoS2, and these showed n-type behavior with an on/off ratio of about 10(3). (C) 2015 Elsevier B.V. All rights reserved. | en_US |
dc.description.sponsorship | This work was supported by a National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (NRF-2013R1A2A2A01015824). | en_US |
dc.language.iso | en | en_US |
dc.publisher | ELSEVIER SCIENCE SA | en_US |
dc.subject | Molybdenum disulfide | en_US |
dc.subject | Chemical vapor deposition | en_US |
dc.subject | Field effect transistor | en_US |
dc.title | Structural and optical properties of MoS2 layers grown by successive two-step chemical vapor deposition method | en_US |
dc.type | Article | en_US |
dc.relation.volume | 587 | - |
dc.identifier.doi | 10.1016/j.tsf.2015.01.036 | - |
dc.relation.page | 47-51 | - |
dc.relation.journal | THIN SOLID FILMS | - |
dc.contributor.googleauthor | Qiu, Dongri | - |
dc.contributor.googleauthor | Lee, Dong Uk | - |
dc.contributor.googleauthor | Pak, Sang Woo | - |
dc.contributor.googleauthor | Kim, Eun Kyu | - |
dc.relation.code | 2015002894 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF NATURAL SCIENCES[S] | - |
dc.sector.department | DEPARTMENT OF PHYSICS | - |
dc.identifier.pid | ek-kim | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.