Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 정진욱 | - |
dc.date.accessioned | 2016-09-23T07:26:06Z | - |
dc.date.available | 2016-09-23T07:26:06Z | - |
dc.date.issued | 2015-03 | - |
dc.identifier.citation | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v. 15, Page. 2542-2546 | en_US |
dc.identifier.issn | 1533-4880 | - |
dc.identifier.issn | 1533-4899 | - |
dc.identifier.uri | http://www.ingentaconnect.com/content/asp/jnn/2015/00000015/00000003/art00099 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/23318 | - |
dc.description.abstract | The effects of plasma parameters such as plasma density, electron temperature, and sheath voltage on the uniformity of Cu nanoparticle arrays were investigated. These parameters were controlled by varying the pressure, RF power, and substrate bias voltage. A floating harmonic method was used to monitor the plasma parameters. Uniform nanoparticle arrays were produced when hole generation was increased by using a high ion bombardment energy. As oppose to a low energy flux condition, where small and large nanoparticles coexisted due to a small number of holes, a larger number of holes was generated and distributed more uniformly during a high energy flux condition. | en_US |
dc.description.sponsorship | We greatly appreciate the support provided by the Research Institute of Advanced Materials, Seoul National University, and this work was also supported by the National Research Foundation of Korea (NRF) grant funded by the Korea government (MEST). (No. 2012007165). | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMER SCIENTIFIC PUBLISHERS | en_US |
dc.subject | Nanoparticles | en_US |
dc.subject | Copper | en_US |
dc.subject | Plasma | en_US |
dc.subject | Plasma-Induced Dewetting | en_US |
dc.title | Control of Size Uniformity of Cu Nanoparticle Array Produced by Plasma-Induced Dewetting | en_US |
dc.type | Article | en_US |
dc.relation.volume | 15 | - |
dc.identifier.doi | 10.1166/jnn.2015.10237 | - |
dc.relation.page | 2542-2546 | - |
dc.relation.journal | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | - |
dc.contributor.googleauthor | Kwon, Soon-Ho | - |
dc.contributor.googleauthor | Choe, Han Joo | - |
dc.contributor.googleauthor | Lee, Hyo-Chang | - |
dc.contributor.googleauthor | Chung, Chin-Wook | - |
dc.contributor.googleauthor | Lee, Jung-Joong | - |
dc.relation.code | 2015003357 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF ELECTRICAL AND BIOMEDICAL ENGINEERING | - |
dc.identifier.pid | joykang | - |
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