Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 최창환 | - |
dc.date.accessioned | 2016-05-31T07:58:03Z | - |
dc.date.available | 2016-05-31T07:58:03Z | - |
dc.date.issued | 2015-01 | - |
dc.identifier.citation | APPLIED PHYSICS LETTERS, v. 106, NO 2, Page. 21601-21604 | en_US |
dc.identifier.issn | 0003-6951 | - |
dc.identifier.uri | http://hdl.handle.net/20.500.11754/21462 | - |
dc.identifier.uri | http://aip.scitation.org/doi/10.1063/1.4905634 | - |
dc.description.abstract | We deposited a metal oxide buffer layer before atomic layer deposition (ALD) of Al2O3 onto exfoliated molybdenum disulfide (MoS2) in order to accomplish enhanced integration. We demonstrate that even at a high temperature, functionalization of MoS2 by means of a metal oxide buffer layer can effectively provide nucleation sites for ALD precursors, enabling much better surface coverage of Al2O3. It is shown that using a metal oxide buffer layer not only allows high temperature ALD process, resulting in highly improved quality of Al2O3/MoS2 interface, but also leaves MoS2 intact. (C) 2015 AIP Publishing LLC. | en_US |
dc.language.iso | en | en_US |
dc.publisher | AMER INST PHYSICS | en_US |
dc.subject | DEPOSITION | en_US |
dc.subject | DICHALCOGENIDE NANOSHEETS | en_US |
dc.subject | HIGH-K DIELECTRICS | en_US |
dc.subject | 2-DIMENSIONAL CRYSTALS | en_US |
dc.subject | HIGH-PERFORMANCE | en_US |
dc.subject | MULTILAYER MOS2 | en_US |
dc.subject | SURFACE-ENERGY | en_US |
dc.subject | MONOLAYER MOS2 | en_US |
dc.subject | TRANSISTORS | en_US |
dc.subject | GRAPHENE | en_US |
dc.title | Improved high temperature integration of Al2O3 on MoS2 by using a metal oxide buffer layer | en_US |
dc.type | Article | en_US |
dc.relation.no | 2 | - |
dc.relation.volume | 106 | - |
dc.identifier.doi | 10.1063/1.4905634 | - |
dc.relation.page | 21601-21604 | - |
dc.relation.journal | APPLIED PHYSICS LETTERS | - |
dc.contributor.googleauthor | Son, Seokki | - |
dc.contributor.googleauthor | Yu, Sunmoon | - |
dc.contributor.googleauthor | Kim, Dohyung | - |
dc.contributor.googleauthor | Choi, Moonseok | - |
dc.contributor.googleauthor | Choi, Changhwan | - |
dc.relation.code | 2015002886 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DIVISION OF MATERIALS SCIENCE & ENGINEERING | - |
dc.identifier.pid | cchoi | - |
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