Effect of Sealing Time of Anodic Aluminum Oxide (AAO) Film for Preventing Plasma Damage

Title
Effect of Sealing Time of Anodic Aluminum Oxide (AAO) Film for Preventing Plasma Damage
Author
오성근
Keywords
Aluminum oxide; Anodizing; Contamination particles; Plasma resistance; Sealing
Issue Date
2015-01
Publisher
AMER SCIENTIFIC PUBLISHERS
Citation
SCIENCE OF ADVANCED MATERIALS, v. 7, Page. 127-132
Abstract
The damage to the surface structure of Anodic Aluminum Oxide (AAO) caused by plasma and heat is evaluated with respect to the sealing time (0, 10, 30 and 60 minutes). With 10 minutes sealing time of the oxide layer, the leakage current is abruptly reduced, while the breakdown voltage and permittivity are rapidly improved. Longer sealing after 10 minutes makes less efficiencies. In the samples sealed for 30 or 60 minutes, more cracks are generated by plasma and heat treatments, result in the reduction of the breakdown voltage. Sealing longer than 10 minutes produces much contamination particles by plasma treatment. The resistance to plasma and heat is improved with a sealing time of 10 minutes.
URI
http://hdl.handle.net/20.500.11754/21286http://www.ingentaconnect.com/content/asp/sam/2015/00000007/00000001/art00019
ISSN
1947-2935
DOI
10.1166/sam.2015.2091
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > CHEMICAL ENGINEERING(화학공학과) > Articles
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