A novel three-dimensional NAND flash structure for improving the erase performance
- Title
- A novel three-dimensional NAND flash structure for improving the erase performance
- Author
- 최선준
- Keywords
- flash memory; 3D NAND; indium gallium zinc oxide (IGZO)
- Issue Date
- 2019-02
- Publisher
- IEICE-INST ELECTRONICS INFORMATION COMMUNICATIONS ENG
- Citation
- IEICE ELECTRONICS EXPRESS, v. 16, no. 3, article no. 20181016
- Abstract
- In this paper, the Indium Gallium Zinc Oxide (IGZO)-Oxide-P-filler (IOP) structure is proposed to improve the poor erase performance of three-dimensional (3D) NAND flash structures using IGZO channel. First, the erase performance of the polysilicon channel and the IGZO channel of the 3D NAND flash structure were compared. During this simulation, the IGZO channel displayed a low 0.06 V erase performance. To solve this problem, the proposed IOP structure was able to produce a memory window of 5.29 V. Based on these results, we confirmed that the lOP structure can greatly improve erase performance, which is the largest obstacle in using the IGZO channel.
- URI
- https://www.jstage.jst.go.jp/article/elex/16/3/16_16.20181016/_articlehttps://repository.hanyang.ac.kr/handle/20.500.11754/151513
- ISSN
- 1349-2543
- DOI
- 10.1587/elex.16.20181016
- Appears in Collections:
- INDUSTRY-UNIVERSITY COOPERATION FOUNDATION[S](산학협력단) > ETC
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