Effect of microwave irradiation on the electrical and optical properties of SnO2 thin films
- Title
- Effect of microwave irradiation on the electrical and optical properties of SnO2 thin films
- Author
- 김현우
- Keywords
- SnO2; Transparent conductive oxide; Microwave irradiation; Electrical and optical properties
- Issue Date
- 2019-04
- Publisher
- ELSEVIER SCI LTD
- Citation
- CERAMICS INTERNATIONAL, v. 45, NO 6, Page. 7723-7729
- Abstract
- We report the electrical and optical characteristics of SnO2 thin films irradiated by microwaves (MWs) and grown using atomic layer deposition in a commercial MW oven operating at a frequency of 2.45 GHz. The properties of the MW-irradiated SnO2 thin films were compared with those of the as-deposited SnO2 thin films. After MW irradiation, the conductivity and transparency of the thin films were enhanced. In addition, the samples irradiated for 5 min showed optimal carrier concentration, Hall mobility, resistivity, and transmittance values of 1.5 x 10(20) cm(-3), 4.6 cm(2)/V s, 8 x 10(-3) Omega cm, and 95.77%, respectively. The improved properties of the MW-irradiated samples were attributed mainly to the formation of an oxygen vacancy in the SnO2 lattice during MW irradiation. Our results can be applied for the fabrication of pure SnO2-based transparent conductive oxides; these oxides are generally doped with other elements.
- URI
- https://www.sciencedirect.com/science/article/pii/S0272884219300781?via%3Dihubhttps://repository.hanyang.ac.kr/handle/20.500.11754/151021
- ISSN
- 0272-8842; 1873-3956
- DOI
- 10.1016/j.ceramint.2019.01.074
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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