극한환경용 초소형 응축 핵 계수기 개발 및 성능평가

Abstract

Due to the development of technology, a requirement of nano-particle control technology has been drastically increased in the high-end technology fabrication processes and many other industries. Especially, the particulate material size and number concentration measurement field is increasing now, and the one of the representative system device is SMPS (Scanning Mobility Particle Sizer) which is consist of CPC(condensation Particle Counter) and DMA(Differential Mobility Analyzer). This system can show accurate results but, it has very complex configuration and requires nomal condition environment . Therefore, to compensate for these shortcomings, this study will provide improvements about extreme condition and new measurement methods using by condensation properties (Kelvin effect) and also develop CPC (Condensation Particle Counter). The condensational growth and evaporation of liquid droplets in the transition regime and in the continuum regime are considered. An analytical solution that includes both transition regime corrections for mass and heat transfer and the Kelvin effect is derived. The solution represents an improvement over earlier analytical solutions, which are valid only in the continuum regime. We were measured using a optical particle counter. The measurements display occurrences of relatively high number concentrations of sub-micron size aerosols with radii=0.15?0.6 ?m near the tropopause region (between about 130 and 450 torr)