분자층 증착법을 이용한 나노복합초격자 박막 제조

Abstract

Nano hybrid superlattices consisting of organic and inorganic components have great potential for creation of new types of functional material by utilizing the wide variety of properties which differ from their constituents. They provide the opportunity for developing new materials with new useful properties. Herein, we fabricated new type of organic-inorganic nano hybrid superlattice thin films by a sequential, self-limiting surface chemistry process known as molecular layer depostion (MLD) combined with atomic layer deposition (ALD). An organic layer was formed at 150°C using MLD with repeated sequintial adsorption of Hydroquinone (C6H4(OH)2) and Titanium tetrachloride (TiCl4). A TiO2 inorganic nanolayer was deposited at the same temperature using ALD with alternating surface-saturating reactions of Titanium tetrachloride (TiCl4) and water (H2O). Using UV-Vis spectroscopy, FTIR spectroscopy, XPS, Ellipsometry, and TEM analysis, the chemical composition, thickness, and microstructure of the organic-inorganic nano hybrid thin films were examined.