자성연마입자와 음향방출센서를 이용한 IZO 박막의 피니싱 공정에 관한 연구

Abstract

In order to complement the disadvantage of magnetic abrasive polishing (MAP), a magnet was attached under the bottom of the glass. The magnetic force generated by adding the magnet makes the roughness uniform in small area. The shape and roughness of samples operated by MAP process were measured by using 3D non-contact surface profiler. During the MAP process, signals were collected using acoustic emission (AE) sensor. Based on the collected signal, neural network was conducted to predict the status of the polishing process. The MAP process that added the magnetic force is simple and cost-effective process that can manufacture the superior surface roughness. It has shown the probability to substitute micromachining.