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Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime

Title
Selection of CVD Diamond Crystal Size on a CVD Pad Conditioner for Improved Lifetime
Author
박진구
Keywords
CMP pad conditioner; CVD conditioner; Diamond crystal size; Raman spectroscopy; Conditioner lifetime
Issue Date
2019-05
Publisher
KOREAN INST METALS MATERIALS
Citation
ELECTRONIC MATERIALS LETTERS, v. 15, No. 3, Page. 357-362
Abstract
Pad conditioners are important consumables for semiconductor chemical mechanical planarization processes. Recently, a new concept has been developed to improve the performance and lifetime of a pad conditioner by depositing diamond film on a uniformly patterned substrate. In this study, we investigated the pad conditioner lifetime while varying the crystal size of the deposited diamond film, which was controlled via different methane ( CH4) gas concentrations in hydrogen gas (H2). Microcrystalline diamond (MCD) film was formed using 2% CH4 in H2 flow and nanocrystalline diamond film (NCD) was formed with 4% CH4. The NCD film showed a longer lifetime and higher adhesion with the substrate than the MCD film.
URI
https://link.springer.com/article/10.1007%2Fs13391-019-00123-0http://repository.hanyang.ac.kr/handle/20.500.11754/121719
ISSN
1738-8090; 2093-6788
DOI
10.1007/s13391-019-00123-0
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MATERIALS SCIENCE AND CHEMICAL ENGINEERING(재료화학공학과) > Articles
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