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Electric Potentials of Vertical Flash Memory with a Macaroni Structure

Title
Electric Potentials of Vertical Flash Memory with a Macaroni Structure
Author
김태환
Keywords
Vertical Flash Memory; Macaroni MOSFET; Electric Potential
Issue Date
2018-10
Publisher
AMER SCIENTIFIC PUBLISHERS
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v. 18, no. 9, page. 5932-5935
Abstract
This paper presents the analytical electric potentials of vertical flash memory with a macaroni structure derived by solving a one-dimensional Poisson equation for vertical flash memory. The solution provides the cross-sectional electric potentials between the surface and the inner oxide layer of the polysilicon channel in flash memory. The band bending and the charge density were obtained on the basis of the electric potential of the device, which is an important factor in flash memory operation. Additional parameters for the electric potentials in flash memory with a macaroni structure are described.
URI
https://www.ingentaconnect.com/content/asp/jnn/2018/00000018/00000009/art00014http://repository.hanyang.ac.kr/handle/20.500.11754/120413
ISSN
1533-4880; 1533-4899
DOI
10.1166/jnn.2018.15577
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ELECTRONIC ENGINEERING(융합전자공학부) > Articles
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