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dc.contributor.author이성재-
dc.date.accessioned2019-12-01T13:01:51Z-
dc.date.available2019-12-01T13:01:51Z-
dc.date.issued2017-10-
dc.identifier.citationJOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 71, no. 8, page. 506-509en_US
dc.identifier.issn0374-4884-
dc.identifier.issn1976-8524-
dc.identifier.urihttps://link.springer.com/article/10.3938%2Fjkps.71.506-
dc.identifier.urihttps://repository.hanyang.ac.kr/handle/20.500.11754/115878-
dc.description.abstractA high degree of accuracy in bulk micromachining is essential to fabricate micro-electro-mechanical systems (MEMS) devices. A series of etching experiments is carried out using 40 wt% KOH solutions at the constant temperature of 70 degrees C. Before wet etching, SF6 and O-2 are used as the dry etching gas to etch the masking layers of a 100 nm thick Si3N4 and SiO2, respectively. The experimental results indicate that (100) silicon wafer form the pyramidal structures with (111) single crystal planes. All the etch profiles are analyzed using Scanning Electron Microscope (SEM) and the wet etch rates depend on the opening sizes. The manufactured pyramidal structures are used as the pattern of silicon mold. After a short hardening of coated polydimethylsiloxane (PDMS) layer, micro pyramidal structures are easily transferred to PDMS layer.en_US
dc.description.sponsorshipThis work was supported by Korea Institute of Science and Technology (KIST, 2E26140), National Research Foundation of Korea (NRF) grant funded by the Korean government (MSIP) (NRF-2015R1A4A1041631), and Hallym university's Research Fund in 2016 (HRF-201608-000).en_US
dc.language.isoen_USen_US
dc.publisherKOREAN PHYSICAL SOCen_US
dc.subjectWet etchingen_US
dc.subjectPotassium hydroxideen_US
dc.subjectSi molden_US
dc.subjectPattern transferen_US
dc.subjectPDMSen_US
dc.titleMicro-pyramidal structure fabrication on polydimethylsiloxane (PDMS) by Si (100) KOH wet etchingen_US
dc.typeArticleen_US
dc.relation.no8-
dc.relation.volume71-
dc.identifier.doi10.3938/jkps.71.506-
dc.relation.page506-509-
dc.relation.journalJOURNAL OF THE KOREAN PHYSICAL SOCIETY-
dc.contributor.googleauthorHwang, Shinae-
dc.contributor.googleauthorLim, Kyungsuk-
dc.contributor.googleauthorShin, Hyeseon-
dc.contributor.googleauthorLee, Seongjae-
dc.contributor.googleauthorJang, Moongyu-
dc.relation.code2017000496-
dc.sector.campusS-
dc.sector.daehakCOLLEGE OF NATURAL SCIENCES[S]-
dc.sector.departmentDEPARTMENT OF PHYSICS-
dc.identifier.pidleesj-
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COLLEGE OF NATURAL SCIENCES[S](자연과학대학) > PHYSICS(물리학과) > Articles
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