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Polarization errors associated with reflective objectives in a micro-spot spectroscopic ellipsometer

Title
Polarization errors associated with reflective objectives in a micro-spot spectroscopic ellipsometer
Author
안일신
Issue Date
2019-05
Publisher
IOP PUBLISHING LTD
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS, v. 58, No. 5, Article no. 058003
Abstract
A micro-spot spectroscopic ellipsometer covering 1.5-4.8 eV is developed using two infinity-corrected reflective objectives. Only a small portion of the entrance pupil in the objective is used to obtain a similar to 50 mu m x 70 mu m spot on a sample. However, non-normal reflections inside the objectives cause experimental errors (up to 2.3 degrees in Delta) when they are arranged symmetrically about a sample. In this paper, we show how to diagnose the polarization errors associated with the reflective objectives and how to deal with them. (C) 2019 The Japan Society of Applied Physics
URI
https://iopscience.iop.org/article/10.7567/1347-4065/ab1646/metahttp://repository.hanyang.ac.kr/handle/20.500.11754/114745
ISSN
0021-4922; 1347-4065
DOI
10.7567/1347-4065/ab1646
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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