Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 백운규 | - |
dc.date.accessioned | 2019-11-20T07:01:39Z | - |
dc.date.available | 2019-11-20T07:01:39Z | - |
dc.date.issued | 2017-02 | - |
dc.identifier.citation | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v. 6, no. 4, page. 169-171 | en_US |
dc.identifier.issn | 2162-8769 | - |
dc.identifier.uri | http://jss.ecsdl.org/content/6/4/P169 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/112583 | - |
dc.description.abstract | Herein, the corrosion behaviors of W metal gates in the presence of H2O2 at the acidic medium were investigated as a function of dipping time, temperature, and H2O2 concentration. We determined the kinetic constants (i.e. k(w) and k(h)) based on the experimental data. The activation energy (E-a) are calculated from the Arrhenius equation. Thermodynamic parameters (Delta G(double dagger), Delta H-double dagger, and Delta S-double dagger) for the dissolution were determined based on the Eyring plot. These results investigated in this study will provide researchers the prior information on parameters to control the corrosion behaviors of Wmetal gates during the chemical mechanical planarization (CMP) process. (c) 2017 The Electrochemical Society. All rights reserved. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | ELECTROCHEMICAL SOC INC | en_US |
dc.subject | Corrosion | en_US |
dc.subject | Dissolution | en_US |
dc.subject | Kinetics | en_US |
dc.subject | Thermodynamics | en_US |
dc.subject | Tungsten gates | en_US |
dc.title | Communication-Corrosion Behavior of Tungsten Metal Gate in the Presence of Hydrogen Peroxide at Acidic Medium | en_US |
dc.type | Article | en_US |
dc.relation.no | 4 | - |
dc.relation.volume | 6 | - |
dc.identifier.doi | 10.1149/2.0311704jss | - |
dc.relation.page | 169-171 | - |
dc.relation.journal | ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | - |
dc.contributor.googleauthor | Seo, Jihoon | - |
dc.contributor.googleauthor | You, Keungtae | - |
dc.contributor.googleauthor | Moon, Jinok | - |
dc.contributor.googleauthor | Kim, Joo Hyun | - |
dc.contributor.googleauthor | Paik, Ungyu | - |
dc.relation.code | 2017011825 | - |
dc.sector.campus | S | - |
dc.sector.daehak | COLLEGE OF ENGINEERING[S] | - |
dc.sector.department | DEPARTMENT OF ENERGY ENGINEERING | - |
dc.identifier.pid | upaik | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.