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Communication-Corrosion Behavior of Tungsten Metal Gate in the Presence of Hydrogen Peroxide at Acidic Medium

Title
Communication-Corrosion Behavior of Tungsten Metal Gate in the Presence of Hydrogen Peroxide at Acidic Medium
Author
백운규
Keywords
Corrosion; Dissolution; Kinetics; Thermodynamics; Tungsten gates
Issue Date
2017-02
Publisher
ELECTROCHEMICAL SOC INC
Citation
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v. 6, no. 4, page. 169-171
Abstract
Herein, the corrosion behaviors of W metal gates in the presence of H2O2 at the acidic medium were investigated as a function of dipping time, temperature, and H2O2 concentration. We determined the kinetic constants (i.e. k(w) and k(h)) based on the experimental data. The activation energy (E-a) are calculated from the Arrhenius equation. Thermodynamic parameters (Delta G(double dagger), Delta H-double dagger, and Delta S-double dagger) for the dissolution were determined based on the Eyring plot. These results investigated in this study will provide researchers the prior information on parameters to control the corrosion behaviors of Wmetal gates during the chemical mechanical planarization (CMP) process. (c) 2017 The Electrochemical Society. All rights reserved.
URI
http://jss.ecsdl.org/content/6/4/P169http://repository.hanyang.ac.kr/handle/20.500.11754/112583
ISSN
2162-8769
DOI
10.1149/2.0311704jss
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > ENERGY ENGINEERING(에너지공학과) > Articles
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