Repository at Hanyang UniversityCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학)APPLIED PHYSICS(응용물리학과)Articles
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정희준 | - |
| dc.date.accessioned | 2019-11-12T06:28:31Z | - |
| dc.date.available | 2019-11-12T06:28:31Z | - |
| dc.date.issued | 2005-12 | - |
| dc.identifier.citation | MATERIALS LETTERS, v. 59, No. 29-30, Page. 3900-3903 | en_US |
| dc.identifier.issn | 0167-577X | - |
| dc.identifier.issn | 1873-4979 | - |
| dc.identifier.uri | https://www.sciencedirect.com/science/article/pii/S0167577X05007044 | - |
| dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/112121 | - |
| dc.description.abstract | This paper is concerned with the effect of material discontinuities, such as porosity, on the modulus of elasticity and attempts to simulate the effects of porosity in polysilicon using a finite element model. The proposed Young's modulus model is applied to the simulation of a polysilicon MEMS gyro. When the compensated Young's modulus is used in this simulation, we can reduce the difference between the simulation and the actual experimental result. (C) 2005 Elsevier B.V. All rights reserved. | en_US |
| dc.description.sponsorship | This work was financial supported by MOCIE (Ministry of Commerce, Industrial and Energy) under project named as Milli-Structure manufacturing technology. | en_US |
| dc.language.iso | en_US | en_US |
| dc.publisher | ELSEVIER SCIENCE BV | en_US |
| dc.subject | microstructure | en_US |
| dc.subject | material discontinuity | en_US |
| dc.subject | porosity | en_US |
| dc.subject | porous elasticity modulus | en_US |
| dc.subject | finite element model | en_US |
| dc.title | A compensation of Young's modulus in polysilicon structure with discontinuous material distribution | en_US |
| dc.type | Article | en_US |
| dc.identifier.doi | 10.1016/j.matlet.2005.07.040 | - |
| dc.relation.journal | MATERIALS LETTERS | - |
| dc.contributor.googleauthor | Lee, DC | - |
| dc.contributor.googleauthor | Choi, HS | - |
| dc.contributor.googleauthor | Han, CS | - |
| dc.contributor.googleauthor | Jeong, HJ | - |
| dc.relation.code | 2009206485 | - |
| dc.sector.campus | E | - |
| dc.sector.daehak | COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E] | - |
| dc.sector.department | DEPARTMENT OF APPLIED PHYSICS | - |
| dc.identifier.pid | hjeong | - |
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