16 0

A compensation of Young's modulus in polysilicon structure with discontinuous material distribution

Title
A compensation of Young's modulus in polysilicon structure with discontinuous material distribution
Author
정희준
Keywords
microstructure; material discontinuity; porosity; porous elasticity modulus; finite element model
Issue Date
2005-12
Publisher
ELSEVIER SCIENCE BV
Citation
MATERIALS LETTERS, v. 59, No. 29-30, Page. 3900-3903
Abstract
This paper is concerned with the effect of material discontinuities, such as porosity, on the modulus of elasticity and attempts to simulate the effects of porosity in polysilicon using a finite element model. The proposed Young's modulus model is applied to the simulation of a polysilicon MEMS gyro. When the compensated Young's modulus is used in this simulation, we can reduce the difference between the simulation and the actual experimental result. (C) 2005 Elsevier B.V. All rights reserved.
URI
https://www.sciencedirect.com/science/article/pii/S0167577X05007044http://repository.hanyang.ac.kr/handle/20.500.11754/112121
ISSN
0167-577X; 1873-4979
DOI
10.1016/j.matlet.2005.07.040
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE