microstructure; material discontinuity; porosity; porous elasticity modulus; finite element model
ELSEVIER SCIENCE BV
MATERIALS LETTERS, v. 59, No. 29-30, Page. 3900-3903
This paper is concerned with the effect of material discontinuities, such as porosity, on the modulus of elasticity and attempts to simulate the effects of porosity in polysilicon using a finite element model. The proposed Young's modulus model is applied to the simulation of a polysilicon MEMS gyro. When the compensated Young's modulus is used in this simulation, we can reduce the difference between the simulation and the actual experimental result. (C) 2005 Elsevier B.V. All rights reserved.