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Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry

Title
Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry
Author
안일신
Keywords
spectroscopy; compensator; ellipsometry; retardance; rubbing; polyimide
Issue Date
2005-10
Publisher
INST PURE APPLIED PHYSICS
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v. 44, No. 10, Page. 7667-7670
Abstract
Rotating compensator spectroscopic ellipsometry was used to study the optical properties of a rubbed polyimide layer. Two operating modes in the transmission configuration were studied. One was a conventional mode of 'polarizer-sample-rotating compensator-analyzer'. The other was a dual rotation mode of 'polarizer-rotating sample-rotating compensator-analyzer'. We found that calibration is not possible in the conventional mode due to the extremely small retardance and non-dichroic nature of the sample. Meanwhile, in dual rotation mode which we developed, a retardance smaller than 0.5 degrees could be measured without calibration. Using this technique, the variation in retardance with rubbing could be easily determined over a range of 320-800 nm. The optical axis could also be determined with high precision for this sample, and this optical axis was found to be parallel to the direction of rubbing.
URI
https://iopscience.iop.org/article/10.1143/JJAP.44.7667http://repository.hanyang.ac.kr/handle/20.500.11754/111675
ISSN
0021-4922
DOI
10.1143/JJAP.44.7667
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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