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Spectroscopic Ellipsometry Studies of Thin Films Prepared by Glancing Angle Deposition

Title
Spectroscopic Ellipsometry Studies of Thin Films Prepared by Glancing Angle Deposition
Author
안일신
Issue Date
2005-06
Publisher
KOREAN PHYSICAL SOC
Citation
JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 46, No. 9, Page. 137-141
Abstract
When thin films show columnar growth, the column direction can be changed easily by tilting the substrate with respect to the flux of incoming vapor from the source. We prepared various thin films at glancing angle of incidence by magnetron sputtering and e-beam evaporation. We applied a newly-developed rotating sample and compensator spectroscopic transmission ellipsometer to measure the optical anisotropy of these films. With this instrument, the retardance over 350 to 800 nm could be measured without a calibration process, even for < 1 degrees. Also, the optic axes of these films could be determined with uncertainty < 0.5 degrees. We observed strong birefringence from both e-beam-evaporated and sputtered films. E-beam-evaporated films showed birefringence of similar to 0.016. Meanwhile, magnetron-sputtered film exhibited birefringence of similar to 0.003. Effective medium theory with screening effect revealed that the magnetron-sputtered films contained much less void, which was a possible indication of poorly developed columnar structure.
URI
http://www.jkps.or.kr/journal/view.html?uid=7067&amp;vmd=Fullhttp://repository.hanyang.ac.kr/handle/20.500.11754/110884
ISSN
0374-4884; 1976-8524
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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