Si multiprobes integrated with lateral actuators for independent scanning probe applications
- Title
- Si multiprobes integrated with lateral actuators for independent scanning probe applications
- Author
- 안유민
- Issue Date
- 2005-04
- Publisher
- IOP PUBLISHING LTD
- Citation
- JOURNAL OF MICROMECHANICS AND MICROENGINEERING, v. 15, No. 6, Page. 1224-1229
- Abstract
- Silicon SPM multiprobes having lateral actuators with a very small pitch were microfabricated and evaluated for independent parallel operations and nanomaterial characterizations. Two types of 1 x 4 probe array were developed. In order to treat smaller objects, the distance between each cantilever tip was produced to be as small as possible. The inter-tip distance is about 7 mu m. In addition, the cantilevers of the multiprobes had comb drive actuators that enable individual probes to move horizontally. More flexibility in SPM operation was obtained with these individual self-movement probes possibly opening up new applications in nanotechnology. Using the microfabricated multiprobes, the characterization of the electric properties of a carbon nanotube by a two-probe measurement and the manipulation of a microlens were demonstrated.
- URI
- https://iopscience.iop.org/article/10.1088/0960-1317/15/6/012/metahttps://repository.hanyang.ac.kr/handle/20.500.11754/110362
- ISSN
- 0960-1317
- DOI
- 10.1088/0960-1317/15/6/012
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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