3자유도 병렬식 마이크로 매니퓰레이터의 기구학적 해석 및 설계

Abstract

This paper presents the development methodology of the 3 DOF Parallel Micromanipulator with the PZT-driven flexure hinge amplifier. For the fundamental kinematic configuration of manipulator, inverse and forward kinematics are simulated by Matlab programming. Through the kinematic simulation, the operation range of the platform and the workspace of end-effector are investigated. Under a given driving condition, the PZT-driven flexure hinge amplifier is designed by FEM and optimization tools.