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고진공에서 이온 카운터를 사용한 실시간 입자모니터링 시스템의 개발

Title
고진공에서 이온 카운터를 사용한 실시간 입자모니터링 시스템의 개발
Author
안강호
Issue Date
2006-05
Publisher
한국반도체및디스플레이장비학회
Citation
한국반도체및디스플레이장비학회:학술대회논문집, Page. 255-258
Abstract
In this paper, the new method which is monitoring quantity of particles using by ion-counter has been developed. ISPM system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. Ion-counter applied positive voltage could detect only positive charged particles. Therefore charged particles to Boltzmann equilibrium distribution or to some identified charge distribution can be detected by ion-counter. Ion-counter could install on the exhaust line of process equipment since pressure loss is structurally low. ISPM system has been certified by comparison with the result of SMPS (Scanning Mobility Particle Sizer) system. The relation coefficiency is above 0.98 about 20∼300nm 20∼300nm particles with identified charge distribution under 0.1∼10.0 0.1∼10.0 Torr.
URI
http://www.koreascience.or.kr/article/CFKO200631037010845.pagehttp://repository.hanyang.ac.kr/handle/20.500.11754/107942
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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