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dc.contributor.author오혜근-
dc.date.accessioned2019-07-22T02:37:35Z-
dc.date.available2019-07-22T02:37:35Z-
dc.date.issued2006-02-
dc.identifier.citationJOURNAL OF THE KOREAN PHYSICAL SOCIETY, v. 48, No. 2, Page. 240-245en_US
dc.identifier.issn0374-4884-
dc.identifier.issn1976-8524-
dc.identifier.urihttp://www.jkps.or.kr/journal/view.html?uid=7444&vmd=Full-
dc.identifier.urihttp://repository.hanyang.ac.kr/handle/20.500.11754/107687-
dc.description.abstractThe photoresist of a column spacer is very sensitive to UV light, and its uniformity depends on the exposure process. In a proximity-type aligner, the exposure gap can control the light diffraction and intensity, which affect the column spacer thickness and the critical dimension. The limitation of non-flat mask and work stage causes a non-uniform exposure gap. Applying an attenuated phase shift mask can compensate for this handicap. By using commercial software, we analyzed the difference between a conventional mask and a phase-shift mask as a function of the exposure gap and examined changes in the column spacer's thickness loss and the critical dimension. In order to reduce the diffraction effect and to get a uniform intensity, we varied the transmission in an opaque mask area and found that the thickness uniformity could be improved by about 30 \%. Consequently, we expect the attenuated phase shift mask to have a larger possibility of improving the column spacer's thickness uniformity without any mechanical alteration.en_US
dc.language.isoen_USen_US
dc.publisherKOREAN PHYSICAL SOC(한국물리학회)en_US
dc.titleImprovement of column spacer uniformity in a TFT LCD panelen_US
dc.typeArticleen_US
dc.relation.journalJOURNAL OF THE KOREAN PHYSICAL SOCIETY-
dc.contributor.googleauthorCho, J.H-
dc.contributor.googleauthorSohn, J.M-
dc.contributor.googleauthorKim, S.H-
dc.contributor.googleauthorKim, J.S-
dc.contributor.googleauthorKim, Y.H-
dc.contributor.googleauthorOh, HK-
dc.relation.code2009205987-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E]-
dc.sector.departmentDEPARTMENT OF APPLIED PHYSICS-
dc.identifier.pidhyekeun-
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COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > APPLIED PHYSICS(응용물리학과) > Articles
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