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dc.contributor.author안일신-
dc.date.accessioned2019-06-24T07:13:37Z-
dc.date.available2019-06-24T07:13:37Z-
dc.date.issued2007-08-
dc.identifier.citationJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v. 46, No. 8A, Page. 5326-5330en_US
dc.identifier.issn0021-4922-
dc.identifier.urihttps://iopscience.iop.org/article/10.1143/JJAP.46.5326-
dc.identifier.urihttp://repository.hanyang.ac.kr/handle/20.500.11754/106832-
dc.description.abstractImaging ellipsometry is developed in the dual-rotation mode of a polarizer and an analyzer. In this system, the polarizer and analyzer are rotated by a stepping motor at 1 : 1 ratio and the offset between the azimuths of both elements is kept constant. For data reduction, a two-dimensional array detector collects multiple intensity images during rotation and waveform analysis is performed for each pixel. This system generates second and fourth harmonics in intensity waveform and {A, psi} images are deduced from the amplitudes of these harmonics without considering their phases, which leads to calibration-free imaging ellipsometry. This system works well with an offset between two elements but it becomes less susceptible to an offset-setting error with a smaller offset. Besides the ease of operation, this system is simple to construct as no complicated control mechanism is required for each component.en_US
dc.language.isoen_USen_US
dc.publisherINST PURE APPLIED PHYSICSen_US
dc.subjectellipsometryen_US
dc.subjectimageen_US
dc.subjectdual-rotationen_US
dc.subjectcalibrationen_US
dc.subjectimaging ellipsometeren_US
dc.titleDevelopment of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzeren_US
dc.typeArticleen_US
dc.identifier.doi10.1143/JJAP.46.5326-
dc.relation.journalJAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS-
dc.contributor.googleauthorCheon, Hyuknyeong-
dc.contributor.googleauthorBak, Heung-Jin-
dc.contributor.googleauthorOh, Hyekeun-
dc.contributor.googleauthorLee, Eun-Kyu-
dc.contributor.googleauthorAn, Ilsin-
dc.relation.code2007212719-
dc.sector.campusE-
dc.sector.daehakCOLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E]-
dc.sector.departmentDEPARTMENT OF PHOTONICS AND NANOELECTRONICS-
dc.identifier.pidilsin-


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