Full metadata record
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 안일신 | - |
dc.date.accessioned | 2019-06-24T07:13:37Z | - |
dc.date.available | 2019-06-24T07:13:37Z | - |
dc.date.issued | 2007-08 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v. 46, No. 8A, Page. 5326-5330 | en_US |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | https://iopscience.iop.org/article/10.1143/JJAP.46.5326 | - |
dc.identifier.uri | https://repository.hanyang.ac.kr/handle/20.500.11754/106832 | - |
dc.description.abstract | Imaging ellipsometry is developed in the dual-rotation mode of a polarizer and an analyzer. In this system, the polarizer and analyzer are rotated by a stepping motor at 1 : 1 ratio and the offset between the azimuths of both elements is kept constant. For data reduction, a two-dimensional array detector collects multiple intensity images during rotation and waveform analysis is performed for each pixel. This system generates second and fourth harmonics in intensity waveform and {A, psi} images are deduced from the amplitudes of these harmonics without considering their phases, which leads to calibration-free imaging ellipsometry. This system works well with an offset between two elements but it becomes less susceptible to an offset-setting error with a smaller offset. Besides the ease of operation, this system is simple to construct as no complicated control mechanism is required for each component. | en_US |
dc.language.iso | en_US | en_US |
dc.publisher | INST PURE APPLIED PHYSICS | en_US |
dc.subject | ellipsometry | en_US |
dc.subject | image | en_US |
dc.subject | dual-rotation | en_US |
dc.subject | calibration | en_US |
dc.subject | imaging ellipsometer | en_US |
dc.title | Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer | en_US |
dc.type | Article | en_US |
dc.identifier.doi | 10.1143/JJAP.46.5326 | - |
dc.relation.journal | JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | - |
dc.contributor.googleauthor | Cheon, Hyuknyeong | - |
dc.contributor.googleauthor | Bak, Heung-Jin | - |
dc.contributor.googleauthor | Oh, Hyekeun | - |
dc.contributor.googleauthor | Lee, Eun-Kyu | - |
dc.contributor.googleauthor | An, Ilsin | - |
dc.relation.code | 2007212719 | - |
dc.sector.campus | E | - |
dc.sector.daehak | COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E] | - |
dc.sector.department | DEPARTMENT OF PHOTONICS AND NANOELECTRONICS | - |
dc.identifier.pid | ilsin | - |
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