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Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer

Title
Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer
Author
안일신
Keywords
ellipsometry; image; dual-rotation; calibration; imaging ellipsometer
Issue Date
2007-08
Publisher
INST PURE APPLIED PHYSICS
Citation
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, v. 46, No. 8A, Page. 5326-5330
Abstract
Imaging ellipsometry is developed in the dual-rotation mode of a polarizer and an analyzer. In this system, the polarizer and analyzer are rotated by a stepping motor at 1 : 1 ratio and the offset between the azimuths of both elements is kept constant. For data reduction, a two-dimensional array detector collects multiple intensity images during rotation and waveform analysis is performed for each pixel. This system generates second and fourth harmonics in intensity waveform and {A, psi} images are deduced from the amplitudes of these harmonics without considering their phases, which leads to calibration-free imaging ellipsometry. This system works well with an offset between two elements but it becomes less susceptible to an offset-setting error with a smaller offset. Besides the ease of operation, this system is simple to construct as no complicated control mechanism is required for each component.
URI
https://iopscience.iop.org/article/10.1143/JJAP.46.5326http://repository.hanyang.ac.kr/handle/20.500.11754/106832
ISSN
0021-4922
DOI
10.1143/JJAP.46.5326
Appears in Collections:
COLLEGE OF SCIENCE AND CONVERGENCE TECHNOLOGY[E](과학기술융합대학) > PHOTONICS AND NANOELECTRONICS(나노광전자학과) > Articles
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