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LCD 제조용 스퍼터링 장비의 비접촉식 유리 평판 이송 장치에 대한 수치적 연구

Title
LCD 제조용 스퍼터링 장비의 비접촉식 유리 평판 이송 장치에 대한 수치적 연구
Author
김우승
Issue Date
2007-05
Publisher
한국 반도체 및 디스플레이 장비 학회
Citation
한국반도체및디스플레이장비학회 2007년도 춘계학술대회, Page. 149 - 156
Abstract
Non-contact transportation of the large-sized glass plate using air-cushion is considered for sputtering system of LCD panel. The Argon gas from second gas injection holes is injected to levitate and transport the glass plate. Low maximum pressure and uniform pressure distribution on the bottom surface of the glass plate must be maintained for stable levitation and transportation of the glass plate. Therefore, the analysis of fluid flow between the glass plate and the air-pad is numerically performed for varying space between the injection holes in this study. The pressure uniformity on the bottom surface of the glass plate is evaluated for overall glass plate. The distance between the injection holes must be designed below 90 mm for obtaining the low maximum pressure and uniform pressure distribution.
URI
http://www.ndsl.kr/ndsl/search/detail/article/articleSearchResultDetail.do?cn=NPAP08162470http://repository.hanyang.ac.kr/handle/20.500.11754/106470
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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