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A Dual-Servo Type VCM for a Nano-Level Measurement System

Title
A Dual-Servo Type VCM for a Nano-Level Measurement System
Author
권병일
Keywords
Dual-servo; Finite element analysis; Measurement system; Voice coil motor
Issue Date
2007-03
Publisher
대한전기학회
Citation
Journal of Electrical Engineering & Technology, v. 2, No.1, Page. 50 - 54
Abstract
In this paper, a dual-servo type VCM (Voice Coil Motor) for the measuring of nano-level displacement and small thrust is proposed and developed. The shape of VCM for improving the resolution of displacement and ensuring a large displacement are presented. The FEM (finite element method) is utilized to analyze the characteristics of VCM that produces Linear driving thrust and satisfies the thrust that the measurement system requires. The Prototype is fabricated and an experiment is performed in order to measure displacement. As a result of simulation and testing, the proposed VCM shows the applicable possibility for a nano-level measurement system.
URI
http://www.dbpia.co.kr/journal/articleDetail?nodeId=NODE01287655&language=ko_KRhttps://repository.hanyang.ac.kr/handle/20.500.11754/106347
ISSN
1975-0102
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ELECTRICAL ENGINEERING(전자공학부) > Articles
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