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PZT를 이용한 Semi-inchworm 구동기법의 초정밀 회전 스테이지 개발

Title
PZT를 이용한 Semi-inchworm 구동기법의 초정밀 회전 스테이지 개발
Other Titles
Development of ultra precision rotational stage using Semi-inchworm driving mechanism with PZT
Author
안강호
Keywords
Rotational stage; Impact drive; Inchworm drive; PZT; Semi-inchworm
Issue Date
2007-02
Publisher
한국반도체및디스플레이장비학회
Citation
반도체및디스플레이장비학회지, v. 6, No. 1, Page. 37 - 41
Abstract
Recently PZT is used in ultra precision mechanism field. PZT has a small motion range although it has a high resolution. Many methods, such as inchworm, impact driving, etc., have been applied for the expansion of the motion range.? In this study, the new actuating mechanism for rotational motion with two PZT actuators is proposed. The ultra precision rotational actuator which is made by proposed mechanism is able to operate both coarse and fine motion. The design parameters of the proposed mechanism are considered to improve the performance of the system. The rotational stage which is applied by the proposed mechanism is fabricated. The resolution and velocity for fabricated rotational stage are measured by laser interferometer.
URI
http://www.ndsl.kr/ndsl/search/detail/article/articleSearchResultDetail.do?cn=JAKO200725522708926http://repository.hanyang.ac.kr/handle/20.500.11754/106249
ISSN
1738-2270
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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