Repository at Hanyang UniversityCOLLEGE OF ENGINEERING SCIENCES[E](공학대학)MECHANICAL ENGINEERING(기계공학과)Articles
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대면적 비접촉식 노광장비 마스크와 기판의 국부적 간극제어를 위한 설계
- Title
- 대면적 비접촉식 노광장비 마스크와 기판의 국부적 간극제어를 위한 설계
- Other Titles
- Design of The Local Gap Control between Mask and Substrate for Large Areas Noncontact Exposure System
- Author
- 오제훈
- Keywords
- Mask stage; Proximity exposure; Gap control; Mask holder
- Issue Date
- 2016-10
- Publisher
- 한국정밀공학회
- Citation
- 한국정밀공학회 2016년도 추계학술대회 논문집, Page. 96-97
- URI
- http://www.dbpia.co.kr/Journal/ArticleDetail/NODE07065754https://repository.hanyang.ac.kr/handle/20.500.11754/102785
- Appears in Collections:
- COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > MECHANICAL ENGINEERING(기계공학과) > Articles
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