In
this
study,
Zr-Al-Zn-O
(ZAZO)
thin
films
were
deposited
on
glass
substrates
at
room
temperature
via
co-sputtering.
The
effects
of
Zr
doping
on
the
chemical,
structural
and
optical
properties
of
AZO
films
were
investigated
using
EDAX,
X-ray
diffraction,
and
UV/Vis
spectrometer.
It
was
observed
that
the
structure
of
the
ZAZO
film
changed
from
polycrystalline
into
amorphous
and
their
optical
bandgap
energy
increased
as
the
power
applied
to
the
ZrO
2
target.