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Zr 도핑이 AZO 박막의 물성에 미치는 영향

Title
Zr 도핑이 AZO 박막의 물성에 미치는 영향
Other Titles
Effects of zirconium-doping on the properties of AZO films
Author
박진석
Issue Date
2016-07
Publisher
대한전기학회
Citation
2016년도 제47회 대한전기학회 하계학술대회, Page. 1163-1164
Abstract
In this study, Zr-Al-Zn-O (ZAZO) thin films were deposited on glass substrates at room temperature via co-sputtering. The effects of Zr doping on the chemical, structural and optical properties of AZO films were investigated using EDAX, X-ray diffraction, and UV/Vis spectrometer. It was observed that the structure of the ZAZO film changed from polycrystalline into amorphous and their optical bandgap energy increased as the power applied to the ZrO 2 target.
URI
http://www.dbpia.co.kr/Journal/ArticleDetail/NODE07011766http://repository.hanyang.ac.kr/handle/20.500.11754/102577
Appears in Collections:
COLLEGE OF ENGINEERING SCIENCES[E](공학대학) > ELECTRICAL ENGINEERING(전자공학부) > Articles
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