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Photonic sintering via flash white light combined with deep UV and NIR for SrTiO3 thin film vibration touch panel applications

Title
Photonic sintering via flash white light combined with deep UV and NIR for SrTiO3 thin film vibration touch panel applications
Author
박진성
Keywords
vibration touch panel; SrTiO3; flash white light; near infrared; deep ultraviolet
Issue Date
2016-11
Publisher
IOP PUBLISHING LTD
Citation
NANOTECHNOLOGY, v. 27, NO 50, Page. 1-6
Abstract
An ultra-high speed photonic sintering method consisting of flash white light (FWL) combined with near infrared (NIR) and deep UV light irradiations was developed to fabricate a SrTiO3 (STO) thin film for application in electro-vibration touch panels. The STO thin film was sintered on PEN by FWL irradiation at room temperature under ambient conditions, which is a dramatically simple and ultrahigh speed fabrication process compared to the conventional high temperature (600 degrees C-900 degrees C) thermal sintering process. The effects of the FWL irradiation conditions (energy density, pulse numbers, and pulse duration) on the dielectric constant of the sintered STO thin films were evaluated. Furthermore, the effects of NIR and deep UV irradiation during the FWL sintering process were also investigated.
URI
https://iopscience.iop.org/article/10.1088/0957-4484/27/50/505209/metahttp://repository.hanyang.ac.kr/handle/20.500.11754/101004
ISSN
0957-4484; 1361-6528
DOI
10.1088/0957-4484/27/50/505209
Appears in Collections:
COLLEGE OF ENGINEERING[S](공과대학) > MATERIALS SCIENCE AND ENGINEERING(신소재공학부) > Articles
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