Experimental and Theoretical Investigation on the Scale-Up of a Plasma Reactor
- Title
- Experimental and Theoretical Investigation on the Scale-Up of a Plasma Reactor
- Author
- 정진욱
- Keywords
- Scale-Up; Plasma Parameters; Process Parameters; Global Model; Recipe Solution
- Issue Date
- 2016-10
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Citation
- JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v. 16, NO. 10, Page. 11104-11108
- Abstract
- To enlarge wafer size, plasma processing reactors must be scaled up. However, this change causes variations of the plasma parameters and gas residence time that are directly related to the processing results. To maintain these parameters as the chamber-size increases, accurate control of the external variables, such as the input power, gas pressure, and flow rate, is required. In this paper, these basic process parameters are calculated through 0-dimensional (global) plasma model including multistep ionizations and pumping equations, and applied to match the plasma parameters and gas residence time in experiment and simulation. These results can be used as a reference to determine the external variables as a chamber scales up.
- URI
- https://www.ingentaconnect.com/content/asp/jnn/2016/00000016/00000010/art00177https://repository.hanyang.ac.kr/handle/20.500.11754/100484
- ISSN
- 1533-4880; 1533-4899
- DOI
- 10.1166/jnn.2016.13298
- Appears in Collections:
- COLLEGE OF ENGINEERING[S](공과대학) > ELECTRICAL AND BIOMEDICAL ENGINEERING(전기·생체공학부) > Articles
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