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액상전자현미경 분석법을 위한 그래핀 나노챔버 어레이의 제조공정개발

Title
액상전자현미경 분석법을 위한 그래핀 나노챔버 어레이의 제조공정개발
Other Titles
Development of fabrication process of graphene-sandwiched nanochamber arrays for liquid-phase electron microscopy
Author
김기환
Alternative Author(s)
Kim Kihwan
Advisor(s)
이원철
Issue Date
2019-02
Publisher
한양대학교
Degree
Master
Abstract
최근투과전자현미경을이용하여액상샘플을관찰하고자하는많은노력들이이루어지고있다.이러한노력에는크게두가지가있다.측정하고자하는샘플을얼려촬영하는저온전자현미경(cryo-Electron Microscopy(cryo-EM))과진공과액체를분리해주는작은챔버(Liquid cell)를만들어촬영하는액상투과전자현미경(Liquid cell Transmission Electron Microscopy(LC-TEM))가있다.그중액상투과전자현미경은액상샘플을온전히보존하고, 측정할수있다는장점이있지만,전자빔이투과하는윈도우를가지고있는특성으로인해윈도우두께에따라해상도가감소한다는단점이있다.최근이를극복하기위해그래핀을윈도우로이용하여 Liquid cell을만드는노력들이이루어지고있다.그래핀을윈도우로이용하여제작한Graphene Liquid Cell (GLC)은그래핀의얇은두께덕분에고해상도의이미지를얻을수있게되었지만, 측정하고자하는액상샘플의양과위치를조절할수없어측정하는데많은노력이드는문제점과실험결과의균일성을해치는문제점을가지고있다.따라서,본연구는그래핀과그래핀사이에일정한두께를가진실리콘나노챔버어레이를만들어균일한액상샘플을얻고측정의용이함을얻고자한다.
URI
http://dcollection.hanyang.ac.kr/common/orgView/000000108804http://repository.hanyang.ac.kr/handle/20.500.11754/100320
Appears in Collections:
GRADUATE SCHOOL[S](대학원) > MECHANICAL DESIGN ENGINEERING(기계설계공학과) > Theses (Master)
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