안진호
2016-08-30T04:44:31Z
2016-08-30T04:44:31Z
2015-03
MICROELECTRONIC ENGINEERING, v. 143, NO Special SI, Page. 25-30
0167-9317
1873-5568
http://www.sciencedirect.com/science/article/pii/S0167931715001148
http://hdl.handle.net/20.500.11754/22853
This article presents a facile single step fabrication method of complex 3D microstructures like microtips, microlenses, microtrapezoids, etc. with controlled dimensions which has been the main focus of researchers over the decades. Each type of above mentioned microstructures individually requires a large number of expensive and complex fabrication processes e.g. plasma RIE, stereo lithography, UV micro stamping and so on. In this study, we have proposed a simple, convenient, cost effective and commercially applicable one step dual diffuser lithography (DDL) method for the fabrication of such complex 3D microstructures by adding a pair of diffusers in conventional photolithography, which diffused the incident beam of ultraviolet (UV) light at wide angles. A conventionally used positive photoresist AZP 4620 was exposed to the diffused light at various exposure energies and the effect of change in exposure energy on the fabricated patterns was studied. Patterns with sub-micron dimensions and microtips with similar to 200 nm tip size were also fabricated using the proposed DDL process. The morphology of the fabricated patterns was analyzed using the field-emission scanning electron microscope (FE-SEM) images and 3-dimensional (3D) profiler data. (C) 2015 Elsevier B.V. All rights reserved.
Future Semiconductor Device Technology Development Program - MOTIE (Ministry of Trade, Industry Energy) KSRC (Korea Semiconductor Research Consortium) 90% Overseas Scholarship Program, Higher Education Commission (HEC) - Government of Pakistan
en
ELSEVIER SCIENCE BV
Dual diffuser lithography
Photolithography
Microfabrication
Microtips
Microlens
Dimensionally controlled complex 3D sub-micron pattern fabrication by single step dual diffuser lithography (DDL)
Article
Special SI
143
10.1016/j.mee.2015.02.053
25-30
MICROELECTRONIC ENGINEERING
Hafeez, Hassan
Ryu, Heon-Yul
An, Il Sin
Oh, Hye-Keun
Ahn, Jin-Ho
Park, Jin-Goo
2015001922
S
COLLEGE OF ENGINEERING[S]
DIVISION OF MATERIALS SCIENCE AND ENGINEERING
jhahn