박진구
2019-12-03T01:25:22Z
2019-12-03T01:25:22Z
2017-12
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, v. 535, page. 83-88
0927-7757
https://www.sciencedirect.com/science/article/pii/S0927775717308476?via%3Dihub
https://repository.hanyang.ac.kr/handle/20.500.11754/116630
This study investigates the effect of the adhesion and removal of particles such as silica (SiO2), tantalum (Ta) and polystyrene latex (PSL) from three different kinds of EUV (extreme ultra violet) mask surfaces, specifically silicon (Si), tantalum nitride (TaN), and ruthenium (Ru). The results show that inorganic particles such as silica and Ta deposited on Si surface are harder to remove from its surface than from TaN and Ru surfaces. This is due not only to the presence of van der Waals forces but also the hydrogen bonding force between them. On the other hand, an organic contaminant such as PSL particles deposited on Si is easily removed from the surface. This is due to the presence of van der Waals forces between the surface and particles. Inorganic particles deposited on a Ru surface are easily removed from its surface compared with a Si surface. However, PSL particles deposited on a Ru surface are hard to remove due to the presence of pi bonding between the Ru surface and the PSL particles. To weaken the chemical bonding (pi bond), a tetramethylammonium hydroxide (TMAH) cleaning solution is used to improve the removal efficiency of PSL particles on the Ru surface.
This work was supported by the Future Semiconductor Device Technology Development Program #10045366 funded By MOTIE (Ministry of Trade, Industry & Energy) and KSRC (Korea Semiconductor Research Consortium).
en
ELSEVIER SCIENCE BV
EUV mask
Particle adhesion
Particle removal
Megasonic cleaning
MIR-FTIR
Adhesion and removal behavior of particulate contaminants from EUV mask materials
Article
535
10.1016/j.colsurfa.2017.09.027
10.1016/j.colsurfa.2017.09.027
83-88
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS
Kim, Min-Su
Purushothaman, Muthukrishnan
Kim, Hyun-Tae
Song, Hee-Jin
Park, Jin-Goo
2017002192
S
GRADUATE SCHOOL[S]
DEPARTMENT OF BIONANOTECHNOLOGY
jgpark
P-4051-2019
http://orcid.org/0000-0002-8008-6478