Browsing by Author 이효창

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Showing results 1 to 12 of 12

Issue DateTitleAuthor(s)
2012-12Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge이효창
2014-07Colorimetric polydiacetylene for plasma diagnostics이효창
2011-11Comparisons of the electrical characteristics by impedance matching conditions on the E?H and H?E transition and the hysteresis of inductively coupled plasma이효창
2013-06Discharge mode transition and hysteresis in inductively coupled plasma이효창
2013-10Effect of antenna size on electron kinetics in inductively coupled plasmas이효창
2011-01Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma이효창
2011-11Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma이효창
2012-03Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes이효창
2012-02Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias이효창
2013-03Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases이효창
2011-02Observation of pressure gradient and related flow rate effect on the plasma parameters in plasma processing reactor이효창
2012-04Variation of the electron energy distribution with He dilution in an inductively coupled argon discharge이효창