Browsing by Author 오혜근

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Showing results 1 to 30 of 105

Issue DateTitleAuthor(s)
2008-1122 nm 1:1 line and space patterning by using double patterning and resist reflow process오혜근
2008-0222 nm node contact hole formation in extreme ultra-violet lithography오혜근
2008-0232 nm 1:1 line and space patterning by resist reflow process오혜근
2008-0132 nm 1:1 Line and Space Patterning by Resist Reflow Process오혜근
2007-0232 nm pattern collapse modeling with radial distance and rinse speed오혜근
2007-0832nm Pattern Collapse Modeling with Radial Distance and Rinse Speed오혜근
2007-01Acid Diffusion Length Corresponding to Post Exposure Bake Time and Temperature오혜근
2008-11Acid diffusion length dependency for 32 nm node attenuated and chromeless phase shift mask오혜근
2007-09Acid diffusion length limitation for 45 nm node attenuated and chromeless phase shift mask오혜근
2008-06Aerial Image Characteristics of a Modified Absorber Model for Extreme Ultraviolet Lithography (EUVL)오혜근
2008-06Anisotropic resist reflow process simulation for 22 nm elongated contact holes오혜근
2016-08Anisotropic shadow effects with various pattern directions in an anamorphic high numerical aperture system오혜근
2008-05Application of ellipsometry in immersion lithography오혜근
2017-03Arc-shaped slit effect of EUV lithography with anamorphic high NA system in terms of critical dimension variation오혜근
2005-10ArF photoresist parameter optimization for mask error enhancement factor reduction오혜근
2005-06ArF photoresist parameter optimization for mask error enhancement factor reduction오혜근
2005-06Bulk effects of thermal flow resists오혜근
2005-06Calibration-Free Multichannel Ellipsometry for Retardance Measurement오혜근
2017-03CD Error Caused by Aberration and Its Possible Compensation by Optical Proximity Correction in Extreme-Ultraviolet Lithography오혜근
2007-02Characteristics and prevention of pattern collapse in EUV lithography오혜근
2006-11Chromeless phase lithography using scattering bars and zebra patterns오혜근
2005-03Contact hole reflow by finite element method오혜근
2008-02Critical dimension control for 32 nm node random contact hole array using resist reflow process오혜근
2007-09Critical dimension control for 32 nm random contact hole array with resist reflow process오혜근
2017-09Critical dimension variation caused by wrinkle in extreme ultra-violet pellicle for 3-nm node오혜근
2005-11Defect characterization of Ru/Mo/Si EUV reflector by optical modeling오혜근
2005-07Determination of the optical functions of various liquids by rotating compensator multichannel spectroscopic ellipsometry오혜근
2007-08Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer오혜근
2016-04Eco-friendly photolithography using water-developable pure silk fibroin오혜근
2006-02The effect of transmission reduction by reticle haze formation오혜근