| 2004-02 | A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process | 박진구 |
| 2016-12 | A novel cleaning approach to remove the carbon contaminant from Ru surface of EUV mask | 박진구 |
| 2011-05 | A Self-Assembled Monolayer-Based Micropatterned Array for Controlling Cell Adhesion and Protein Adsorption | 박진구 |
| 2014-01 | Abrasive and additive interactions in high selectivity STI CMP slurries | 박진구 |
| 2014-02 | Abrasive and additive interactions in high selectivity STI CMP slurries | 박진구 |
| 2013-01 | Acoustic cavitation behavior in isopropyl alcohol added cleaning solution | 박진구 |
| 2017-12 | Adhesion and removal behavior of particulate contaminants from EUV mask materials | 박진구 |
| 2017-12 | Adhesion and removal behavior of particulate contaminants from EUV mask materials | 박진구 |
| 2003-02 | Adhesion and removal of silica and alumina slurry particles during Cu CMP process | 박진구 |
| 2008-12 | Adhesion and Removal of Silica and Ceria Particles on the Wafer Surfaces in STI and Poly Si CMP | 박진구 |
| 2009-02 | Adhesion force change on multilayer EUVL mask due to laser induced plasma shock wave | 박진구 |
| 2020-12 | Adhesive resin composites with ceramic nanoparticles for enhanced light extraction efficiency of sandwiched LED device structure | 박진구 |
| 2017-08 | Adsorption of sodium dodecyl sulfate on cleaning of an N-polar GaN surface in an alkaline solution | 박진구 |
| 2017-08 | Adsorption of sodium dodecyl sulfate on cleaning of an N-polar GaN surface in an alkaline solution | 박진구 |
| 2009-12 | Analysis of Scratches Formed on Oxide Surface during Chemical Mechanical Planarization | 박진구 |
| 2018-05 | Area-selective atomic layer deposition using inkjet-printed fluorocarbon patterns as mask layers | 박진구 |
| 2023-04-14 | Benzethonium chloride as a tungsten corrosion inhibitor in neutral and alkaline media for the post-chemical mechanical planarization application | 박진구 |
| 2019-06 | A Breakthrough Method for the Effective Conditioning of PVA Brush Used for Post-CMP Process | 박진구 |
| 2006-12 | Characteristics of high power laser shock waves and their cleaning performance | 박진구 |
| 2016-12 | Characterization of ammonium silicate residue during Polysilazane (PSZ) dry etching in NF3/H2O gas chemistry | 박진구 |
