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Showing results 74 to 84 of 84

Issue DateTitleAuthor(s)
2004-05Simultaneous determination of bulk isotropic and surface-induced anisotropic complex dielectric functions of semiconductors from high speed Mueller matrix ellipsometry안일신
2006-12Single Anti-Reflection Coating Optimization with Different Polarizations for Hyper Numerical Aperture Immersion Lithography안일신
2003-09A Single Zone Azimuth Calibration for Rotating Compensator Multichannel Ellipsometry안일신
2000-03Soft Bake Effect in 193 nm Chemically Amplified Resist안일신
2005-06Spectroscopic Ellipsometry Studies of Thin Films Prepared by Glancing Angle Deposition안일신
2002-02Spectroscopic Ellipsometry Study of the Composition of Cobalt/SiO Thin Films안일신
2001-07Thickness Reduction Effect in a Chemically Amplified Resit Simulator안일신
2003-06Threshold energy resist model for critical dimension prediction안일신
2003-06Use of Rotating Compensator Spectroscopic Ellipsometry for Line-width Control안일신
2003-02Use of Rotating Compensator Spectroscopic Ellipsometry for Monitoring the Photoresist Etching on Si Wafer안일신
2003-12분광 엘립소미트리를 이용한 유리기판 위의 박막분석안일신

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