Browsing by Author 안일신

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Showing results 37 to 40 of 40

Issue DateTitleAuthor(s)
2008-02Resist reflow process for arbitrary 32 nm node pattern안일신
2005-10Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry안일신
2006-12Single Anti-Reflection Coating Optimization with Different Polarizations for Hyper Numerical Aperture Immersion Lithography안일신
2005-06Spectroscopic Ellipsometry Studies of Thin Films Prepared by Glancing Angle Deposition안일신