Browsing by Author 안일신

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Showing results 29 to 40 of 40

Issue DateTitleAuthor(s)
2006-02Optical anisotropy approach in spectroscopic ellipsometry to determine the CD of contact hole patterns안일신
2008-09Optimum Biasing for 45nm Node Chromeless and Attenuated Phase Shift Mask안일신
2008-02Optimum Dose Variation Caused By Post Exposure Bake Temperature Difference Inside Photoresist Over Different Sublayers And Thickness안일신
2008-11Patterning of 32 nm 1:1 Line and Space by Resist Reflow Process안일신
2006-06Patterning of Thin Copper Films under UV exposure in Chlorine-Based Liquids안일신
2007-09Photoresist Adhesion Effect of Resist Reflow Process안일신
2006-09Picosecond Nonlinear OPtical Transmission Measurement on Anatase TiO2 THin Films안일신
2019-05Polarization errors associated with reflective objectives in a micro-spot spectroscopic ellipsometer안일신
2008-02Resist reflow process for arbitrary 32 nm node pattern안일신
2005-10Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry안일신
2006-12Single Anti-Reflection Coating Optimization with Different Polarizations for Hyper Numerical Aperture Immersion Lithography안일신
2005-06Spectroscopic Ellipsometry Studies of Thin Films Prepared by Glancing Angle Deposition안일신