Browsing by Author 안일신

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Showing results 19 to 39 of 39

Issue DateTitleAuthor(s)
2006-08The Influence of Transmission Reduction by Mask Haze Formation in ArF Lithography안일신
2008-09Investigation of Laminated High-k Oxides by Using Vacuum Ultraviolet Spectroscopic Ellipsometry안일신
2006-11Investigation of Optimum Biasing and Undercut for Single Trench Alternating Phase Shift Mask in 193 nm Lithography안일신
2005-07Lens Aberration Effect on the Line Width for Different Pattern Shapes and Duty Ratios안일신
2005-08Line-Width Variation with Absorber Thickness in Extreme Ultraviolet Lithography안일신
2008-11A Mask Generation Approach to Double Patterning Technology with Inverse Lithography안일신
2006-06Mask Haze Measurement by Spectroscopic Ellipsometry안일신
2006-09Morphology and ellipsometry study of pentacene films grown on native SiO2 and glass substrates안일신
2006-11Nonlinear Optical Response of 1-D Photonic Crystals Fabricated by Using a SOl-Gel Method안일신
2006-02Optical anisotropy approach in spectroscopic ellipsometry to determine the CD of contact hole patterns안일신
2008-09Optimum Biasing for 45nm Node Chromeless and Attenuated Phase Shift Mask안일신
2008-02Optimum Dose Variation Caused By Post Exposure Bake Temperature Difference Inside Photoresist Over Different Sublayers And Thickness안일신
2008-11Patterning of 32 nm 1:1 Line and Space by Resist Reflow Process안일신
2006-06Patterning of Thin Copper Films under UV exposure in Chlorine-Based Liquids안일신
2007-09Photoresist Adhesion Effect of Resist Reflow Process안일신
2006-09Picosecond Nonlinear OPtical Transmission Measurement on Anatase TiO2 THin Films안일신
2019-05Polarization errors associated with reflective objectives in a micro-spot spectroscopic ellipsometer안일신
2008-02Resist reflow process for arbitrary 32 nm node pattern안일신
2005-10Rubbed Polyimide Layers Studied by Rotating Sample and Compensator Spectroscopic Ellipsometry안일신
2006-12Single Anti-Reflection Coating Optimization with Different Polarizations for Hyper Numerical Aperture Immersion Lithography안일신
2005-06Spectroscopic Ellipsometry Studies of Thin Films Prepared by Glancing Angle Deposition안일신

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