| 2008-02 | 32 nm 1:1 line and space patterning by resist reflow process | 안일신 |
| 2001-02 | Adsorption of water molecules on stainless steel surface using null ellipsometry | 안일신 |
| 2004-12 | Advances in multichannel ellipsometric techniques for in-situ and real-time characterization of thin films | 안일신 |
| 2003-12 | Aerial Image prediction for mask defect in extreme ultraviolet lithography | 안일신 |
| 2001-08 | Alignment and Calibration of the MgF2 Biplate Compensator for Applications in Rotating Compensator Multichannel Ellipsometry | 안일신 |
| 2000-02 | Alignment of Zero-Order Retardation Plate for Spectroscopic Ellipsometry | 안일신 |
| 2004-05 | Analysis of the optical properties and structure of sculptured thin films from spectroscopic Mueller matrix ellipsometry | 안일신 |
| 2008-06 | Anisotropic resist reflow process simulation for 22 nm elongated contact holes | 안일신 |
| 2008-04 | Application of ellipsometry in immersion lithography | 안일신 |
| 2015-05 | Application of imaging ellipsometry to the detection of latent fingermarks | 안일신 |
| 2005-06 | Bulk Effects of Thermal Flow Resists | 안일신 |
| 2004-05 | Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer | 안일신 |
| 2005-06 | Calibration-Free Multichannel Ellipsometry for Retardance Measurement | 안일신 |
| 2001-02 | Calibrations in rotating compensator spectroscopic ellipsometry | 안일신 |
| 2018-04 | Characterization of Free-Standing Nano-Membranes by Using Ellipsometry | 안일신 |
| 2006-11 | Chromeless Phase Lithography Using Scattering Bars and Zebra Patterns | 안일신 |
| 2019-10 | Comparison Imaging Ellipsometry and its Application to Crystallization of Indium Oxide Thin Films | 안일신 |
| 2018-03 | Comparison null imaging ellipsometry using polarization rotator | 안일신 |
| 2005-06 | Determination of the Optical Functions of Various Liquids by Rotating Compensator Multichannel Spectroscopic Ellipsometry | 안일신 |
| 2007-08 | Development of Calibration-Free Imaging Ellipsometry Using Dual-Rotation of Polarizer and Analyzer | 안일신 |
| 2017-10 | Development of micro-spot spectroscopic ellipsometer using reflective objectives | 안일신 |
| 2002-06 | Development of Multichannel Ellipsometry with Synchronously Rotating Polarizer and Analyzer | 안일신 |
| 2008-10 | Development of vacuum ultraviolet multichannel ellipsometry and its application to the characterization of ultrathin zirconium oxide films | 안일신 |
| 2004-06 | Effect of Extreme Ultraviolet Light Scattering from the Rough Absorber and Buffer Side Wall | 안일신 |
| 2006-02 | The Effect of Transmission Reduction by Reticle Haze Formation | 안일신 |
| 2008-02 | Ellipsometric inspection of the inner surface of pellicle-covered masks | 안일신 |
| 2007-03 | Ellipsometric studies of the absorption of liquid by photo resist | 안일신 |
| 2008-08 | Ellipsometry for Pellicle-Covered Surface | 안일신 |
| 2006-05 | Ellipsometry를 이용한 193 nm photoresist에서의 물의 흡수 연구 | 안일신 |
| 2003-12 | Ellipsometry에서의 calibration 및 입사면 고정형 ellipsometer | 안일신 |
